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Symposium Proceedings
Vol. 2024, Issue Symposium, 2024February 07, 2025 EDT

Prediction of an Industrial Framework for Semiconductor Fabrication and Experimental Validation OF 300 mm Wafer

Da-Woon Jeong, Se-hyun Cha, Tae-Hyun Kim, Wangyu Gwak, Yangwook Choi, HyeongGeun An, Eun-Ho Lee,
FrameworkSemiconductor FabricationPlasma simulationValidation of 300 MM Wafer
https://doi.org/10.4071/001c.129524
IMAPSource Conference Papers
Jeong, Da-Woon, Se-hyun Cha, Tae-Hyun Kim, Wangyu Gwak, Yangwook Choi, HyeongGeun An, and Eun-Ho Lee. 2025. “Prediction of an Industrial Framework for Semiconductor Fabrication and Experimental Validation OF 300 Mm Wafer.” IMAPSource Proceedings 2024 (Symposium): 239–42. https:/​/​doi.org/​10.4071/​001c.129524.
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