ISSN 2380-4505
Vol. 2020, Issue DPC, 2020April 24, 2024 EDT
Micro-features in Glass using Laser Induced Deep Etching for Device Packaging
Micro-features in Glass using Laser Induced Deep Etching for Device Packaging
Delrue, Jean-Pol, Rafael Santos, Norbert Ambrosius, Roman Ostholt, and Stephan Schmidt. 2024. “Micro-Features in Glass Using Laser Induced Deep Etching for Device Packaging.” IMAPSource Proceedings 2020 (DPC): 1010–58. https://doi.org/10.4071/001c.117015.