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Device Packaging Conference Presentations
Vol. 2021, Issue DPC, 2021April 12, 2024 EDT

Stress Reduced Embedded Die Substrate Structure Fabricated for Heterogeneous Integration Using Selective Laser Ablation

Masamitsu Matsuura, Tanemasa Asano, Haruichi Kanaya,
embedded die substrate structureheterogeneous integrationselective laser ablation
https://doi.org/10.4071/001c.116541
IMAPSource Conference Papers
Matsuura, Masamitsu, Tanemasa Asano, and Haruichi Kanaya. 2024. “Stress Reduced Embedded Die Substrate Structure Fabricated for Heterogeneous Integration Using Selective Laser Ablation.” IMAPSource Proceedings 2021 (DPC): 1338–41. https:/​/​doi.org/​10.4071/​001c.116541.
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