Chemistry and Process Considerations for the Removal of Residues for Hybrid Bonding

Phillip Tyler; Ian Cochran; Jonathan Fijal; John Taddei; Thomas Workman; Dominik Suwito; Guilian Gao; Gabe Guevara; Gill Fountain; Cyprian Uzoh; Jeremy Theil; Laura Mirkarimi

doi:10.4071/001c.116486

Tyler, Phillip, Ian Cochran, Jonathan Fijal, John Taddei, Thomas Workman, Dominik Suwito, Guilian Gao, et al. 2024. “Chemistry and Process Considerations for the Removal of Residues for Hybrid Bonding.” IMAPSource Proceedings 2021 (DPC): 842–57. https://doi.org/10.4071/001c.116486.

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Chemistry and Process Considerations for the Removal of Residues for Hybrid Bonding

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