Improving Seed Layer Adhesion and Reliability through RIE Pre-treatment

Mohamed Elghazzali; Roland Rettenmeier

doi:10.4071/001c.116485

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Elghazzali, Mohamed, and Roland Rettenmeier. 2024. “Improving Seed Layer Adhesion and Reliability through RIE Pre-Treatment.” IMAPSource Proceedings 2021 (DPC): 883–909. https://doi.org/10.4071/001c.116485.

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