ISSN 2380-4505
Vol. 2021, Issue DPC, 2021April 10, 2024 EDT
Analysis and Management of the Effects of Fluorinated Gases during Plasma Dicing
Analysis and Management of the Effects of Fluorinated Gases during Plasma Dicing
Hopkins, Janet, David Parker, and Richard Barnett. 2024. “Analysis and Management of the Effects of Fluorinated Gases during Plasma Dicing.” IMAPSource Proceedings 2021 (DPC): 1126–43. https://doi.org/10.4071/001c.116397.