Glass Carriers with Matched CTEs for Wafer Thinning Applications

Dutta, Indrajit (Indy), Jay Zhang, Andy Teng, Steven Lin, Erica Chang, Julia Brueckner, and Varun Singh. 2024. “Glass Carriers with Matched CTEs for Wafer Thinning Applications.” IMAPSource Proceedings 2021 (DPC): 370–86. https:/​/​doi.org/​10.4071/​001c.116298.