Vol. 2019, Issue DPC, 2019January 01, 2019 EDT
UV Projection Scanner Performance in Thick Resists for High Aspect Ratio Cu Pillars
UV Projection Scanner Performance in Thick Resists for High Aspect Ratio Cu Pillars
William Vis, Fabian Benthaus, Habib Hichri, Markus Arendt,
Vis, William, Fabian Benthaus, Habib Hichri, and Markus Arendt. 2019. “UV Projection Scanner Performance in Thick Resists for High Aspect Ratio Cu Pillars.” IMAPSource Proceedings 2019 (DPC): 314–37. https://doi.org/10.4071/2380-4491-2019-DPC-Presentation_TP1_063.