BATCH MICROWAVE PLASMA CLEANING FOR ROBUSTNESS ENHANCEMENT OF AUTOMOTIVE DEVICES: AN ALTERNATIVE TO STRIP-TYPE RADIOFREQUENCY PLASMA

Ghizelle Jane E. Abarro; Rod J. Delos Santos; Alvin B. Denoyo; Darwin De Lazo; Manny S. Ramos

doi:10.4071/2380-4505-2018.1.000458

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Abarro, Ghizelle Jane E., Rod J. Delos Santos, Alvin B. Denoyo, Darwin De Lazo, and Manny S. Ramos. 2018. “BATCH MICROWAVE PLASMA CLEANING FOR ROBUSTNESS ENHANCEMENT OF AUTOMOTIVE DEVICES: AN ALTERNATIVE TO STRIP-TYPE RADIOFREQUENCY PLASMA.” IMAPSource Proceedings 2018 (1): 458–65. https://doi.org/10.4071/2380-4505-2018.1.000458.

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