Environmentally Isolating Packaging for MEMS Sensors

Michael Kranz; Michael Whitley; Carl Rudd; Jeff D. Craven; Steven D. Clark; Robert N. Dean; George T. Flowers

doi:10.4071/isom-2017-WA46_150

Kranz, Michael, Michael Whitley, Carl Rudd, Jeff D. Craven, Steven D. Clark, Robert N. Dean, and George T. Flowers. 2017. “Environmentally Isolating Packaging for MEMS Sensors.” IMAPSource Proceedings 2017 (1): 286–91. https://doi.org/10.4071/isom-2017-WA46_150.

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